Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”

    Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.

High Vacuum

Angle and In-line Valves
High vacuum angle and in-line valves are for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electonics production, as well as food and pharmaceutical manufacturing.
Slit Valves
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
Smooth Vent
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4″ and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).
Solenoid Valve
Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications.  This valve functions properly at an operating pressure as low as 1×10-6Pa(absolute). Face Seal and compression fitting options offer extremely low levels of internal and external leakage.  Two DC and eight AC voltage options are available, paired…