SMC USA
About SMC USA
Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”
Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.
XGT*, High Vacuum Slit Valve
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
- Easier maintenance
- Easy replacement of bellows
- Gate can be replaced from above (Made to order)
- Safety measures
- A mechanical end lock mechanism has been adopted
