Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”
Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
Actuation control pressure isolated from process gas by two seals
Body material: 316L SS secondary remelt
High inlet pressure type: Standard Max. 2300 psig (15.9 MPa); HR Max. 3000 psig (20.7 MPa
Flow capacity: Standard to 400 slpm
Ni-Cr-Mo alloy internals standard
100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less