SMC USA

About SMC USA

     Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”

    Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.

AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)

AZ14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm) Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type: Standard Max. 2300 psig (15.9 MPa); HR: Max. 3000 psig (20.7MPa)
  • Flow capacity: Standard to 400 slpm
  • Ni-Cr-Mo alloy internals available for corrosion resistance
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Surface Finish Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Inlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Product Catalog
Series Catalog