SMC USA
About SMC USA
Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”
Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.
High Vacuum Products
High Vacuum for semiconductor wafer manufacturing requires precision equipment to exhaust air from the process chamber and to supply atmospheric to restore the chanber to atmospheric pressure.
Slit Valves (XGTP) allow access to transfer the wafer into and out of the process chamber.
Angle and Inline Valves (XL, XM, XY) are used to exhaust the chamber.
Supply Valves (XSA, XVD) are used to supply gases to the chamber.