SMC USA

About SMC USA

     Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”

    Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.

XLJ, Vacuum Angle Valve w/Release Valve

XLJ, Vacuum Angle Valve w/Release Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Compatible with inert gases
  • Flange sizes: 25 and 40
  • Operating pressure range: Atmospheric to 0.01 Pa
  • Operating temperature: 5-40°C
  • Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Rated Voltage Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Product Catalog
Series Catalog