Since its establishment, SMC has been a leader in pneumatic technology, providing industry with technology and products to support automation based on the guiding principle of “contributing to automation labor savings in industry.”
Over the past 50+ years, SMC’s products have become established as a recognized international brand through sales, technical, supply and after sale services in world markets. Sales have grown to achieve a 30% global market share.
SL5500, Single Stage Regulator for Ultra High Purity, Low Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
For UHP gas delivery
Flow capacity to 30 slpm
Body material: 316L SS secondary remelt
Hastelloy® internals available for corrosion resistance
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
